发明名称 PROBE CARD
摘要 PROBLEM TO BE SOLVED: To reduce manufacturing and application costs. SOLUTION: A probe board 31 with a probe pin 13 mounted is divided into boards 31a and 31b, and the probe pin 13 is mounted to each of them. Divided cards 32 and 33 are integrated for composing a probe card 34. The number of probe pins to be mounted to one board decreases, the manufacturing yield of each card is improved drastically, and the yield of the entire probe card is improved drastically. Also, maintenance can be made separately for each of them. Further, even if the probe pin of one card is damaged, the other card can be used without any problem.
申请公布号 JP2002222839(A) 申请公布日期 2002.08.09
申请号 JP20010020236 申请日期 2001.01.29
申请人 ADVANTEST CORP 发明人 YAMADA OSAMU
分类号 G01R1/073;H01L21/66;(IPC1-7):H01L21/66 主分类号 G01R1/073
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