| 摘要 |
PROBLEM TO BE SOLVED: To provide a drift measuring method of charged particle beam system which can surely measure the drift at a high speed, concerning to the drift measuring method of the charged particle beam system. SOLUTION: Identical domain is scanned repeatedly about each of X direction and Y direction of a sample, and image signals acquired as the result of scanning are stored in a memory one by one. By displaying the memorized image signals one sheet of image, it is constituted so that the drift of the charged particle beam system is measured.
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