| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a method and device for electron beam irradiation by which stable electron bream irradiation can be performed by effectively avoiding the scattering of an electron beam and, in addition, eliminating the need of a large-scale vacuum chamber. SOLUTION: A support 4 which supports an object 3 to be irradiate with the electron beam and a head section 6 having an electron beam emitting hole 5 at its front end are provided with a differential static pressure floating means 22. The floating beams 22 is floated from the object 3 by a desired prescribed clearance and, at the same time, constitutes a non-contact vacuum sealed section which limitedly forms a vacuum space in an electron beam passage section between the emitting hole 5 and the object 3. The electron beam passage is stabilized by constituting the passage of an extending and contracting mechanism which extends and contracts in the axial direction of a cylindrical wall section, and making the degree of vacuum in the passage to be able to be increased more by making the clearance between the vicinity of the emitting hole 5 and the object 3 accurately settable to a narrow clearance.</p> |
