SEMICONDUCTOR ELEMENT AND METHOD OF MANUFACTURING IT

摘要

PROBLEM TO BE SOLVED: To provide a semiconductor element which facilitates the formation of an optical resonator surface in a semiconductor laser or the like and to provide a method of manufacturing the element. SOLUTION: A 0.1μm thick Si film 2 is formed on a 300μm thick sapphire substrate 1 being formed a surface C as its main surface and nitride compound semiconductor layers are stacked on the film 2 into the structure of a semiconductor laser. After the substrate 1 is polished, the substrate 1 is divided in the plane direction vertical to the substrate 1, whereby an optical resonator surface in the laser is manufactured.