| 摘要 |
PURPOSE:To easily obtain an exact analysis value by scanning a prescribed wavelength range with the characteristic X-ray wavelength of an objective element as a center at a prescribed speed and determining the difference between the integrated value of the detection signal of the characteristic X-ray and the measured value of the background near the characteristic X-ray as the analysis value. CONSTITUTION:A sample S is excited by an excitation ray E to release the X-ray. A spectroscope driving device 3 is controlled by a CPU4 so that the range of the specified wavelength width with the wavelength of the characteristic X-ray of the objective element as a center is subjected to the wavelength scanning at the prescribed speed by an X-ray spectroscope 1. The detection signal of the characteristic X-ray is integrated by an X-ray signal counter 2 and the integrated value NP thereof is stored. The integrated value NB of the X-ray for the same time near the characteristic X-ray is measured and stored. NB is subtracted from NP and the difference therebetween is divided by the integration time. The quotient thereof is multiplied by a peak coefft. to calculate the analysis value which is then displayed on a display device 5.
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