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发明名称
DEVICE FOR ASSEMBLY OF COMPONENT SUPPORTS FOR MICROSYSTEMS
摘要
申请公布号
EP1228526(A1)
申请公布日期
2002.08.07
申请号
EP20000977520
申请日期
2000.11.09
申请人
ASYS GMBH + CO. KG
发明人
HUEGLER, KLAUS
分类号
H01L21/00;(IPC1-7):H01L21/00
主分类号
H01L21/00
代理机构
代理人
主权项
地址
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