发明名称 Wiring structures containing interconnected metal and wiring levels including a continuous, single crystalline or polycrystalline conductive material having one or more twin boundaries
摘要 The present relates to a method of fabricating wiring structures which contain a continuous, single crystalline conductive material extending through the structure. This is achieved in the present invention by utilizing an open-bottomed via liner structure.
申请公布号 US6429519(B1) 申请公布日期 2002.08.06
申请号 US19990277699 申请日期 1999.03.26
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 UZOH CYPRIAN E.
分类号 H01L21/3205;H01L21/768;H01L23/522;H01L23/532;(IPC1-7):H01L23/48 主分类号 H01L21/3205
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