WAFER LEVEL BURN-IN TEST SYSTEM HAVING WAVEFORM MONITORING UNIT AND TEST METHOD

摘要

PURPOSE: A wafer level burn-in test system is provided to previously detect system power and current malfunctions by monitoring a pin driver or an output level of a power supplier through waveform monitoring unit. CONSTITUTION: A waveform monitoring unit(40) comprises a multiplex relay(41) operated according to a connection state of a DUT(Device Under Test)(5), a level shifter(42) for shifting an output of a pin driver(31), an A/D transformer(43) for transforming an input supplied from the level shifter(42) to a digital data, a memory device(44) for saving the transformed data and a waveform monitoring controller(45) connected with the multiplex relay(41), the A/D transformer(43) and the memory device(44) for controlling a monitoring. The waveform monitoring unit(40) is operated by connecting to the pin driver(31) and the power supplier(70).