ELECTRIC SUPPLY UNIT AND A METHOD FOR REDUCING SPARKING DURING SPUTTERING,申请号KR1020027004065-传众专利搜索

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发明名称	ELECTRIC SUPPLY UNIT AND A METHOD FOR REDUCING SPARKING DURING SPUTTERING
摘要
申请公布号	KR20020063559(A)	申请公布日期	2002.08.03
申请号	KR1020027004065	申请日期	2002.03.28
申请人		发明人
分类号	H01J37/34	主分类号	H01J37/34
代理机构		代理人
主权项
地址

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