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发明名称
SEMICONDUCTOR VAPOR GROWTH DEVICE
摘要
申请公布号
JPH01318229(A)
申请公布日期
1989.12.22
申请号
JP19880150138
申请日期
1988.06.20
申请人
TOSHIBA CORP
发明人
KOKUBU YOSHIHIRO
分类号
H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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