| 摘要 |
<p>PROBLEM TO BE SOLVED: To shorten the lead time of product, in multichamber device, by synchronizing the date of maintenance thereby increasing the number of products being processed. SOLUTION: Initially scheduled date of processing product and the date of maintenance are extracted for each of a plurality of chambers (S101). The scheduled data of other chamber for starting maintenance is adjusted to synchronize with that of a chamber among the plurality of chambers reaching the date of maintenance first (S102). Subsequently, the date of processing product is adjusted for each chamber based on the adjusted date of maintenance of each chamber (S103). Finally, the adjusted date of processing product and the date of maintenance are designated to the plurality of chambers (S104).</p> |
