MANUFACTURE OF INTEGRATED PHOTOVOLTAIC DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a method of manufacturing an integrated type photovoltaic device which can surely isolate a rear surface electrode for each photoelectric conversion element and can also improve the yield and output characteristics. SOLUTION: A rear surface electrode 4 is formed (e) for each photoelectric conversion element with two isolation grooves 21a, 21b by irradiating an isolation region with a laser beam LB from the side of a glass substrate 1 and then removing a semiconductor film 13 and a rear surface electrode film (ZnO film 14a/Al film 14b). After the rear surface electrode 4 (a laminated body of ZnO film 14a/Al film 14b) has been etched by making the device immersed into aqueous solution of hydrochloric acid for the chemical etching process and is then dried, the device is sprayed with a high-pressure air flow, in order to remove fiber-like peeled objects of the rear surface electrode 4 generated by the chemical etching process (f).