LASER ANNEALING METHOD AND ITS APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a laser annealing method and its apparatus capable of making an uniform beam irradiation. SOLUTION: A beam 41 from a laser source is rotated with a rotation means 42 at a predetermined angle even though there is an ununiform strength distribution in a beam pattern of the beam 41 from the laser source, thereby, only a beam having a Gaussian distribution can be formed in a linear sectional shape through an optical system 57 by avoiding a strong light-strength portion, therefore, an uniform beam irradiation can be carried out to a sample 50.