| 摘要 |
PROBLEM TO BE SOLVED: To provide a piezoelectric vibration element and the manufacturing apparatus therefor which has the advantages that although it uses a planar type piezoelectric elementary plate, a large energy confinement effect can be obtained, and it can suppress unnecessary modes, and further, it has less adverse effect generated due to its mass which are caused by the positional deviation of the electrodes, etc. SOLUTION: In the piezoelectric vibration element 11 having a piezoelectric elementary plate 12 and having excitation electrode films 13 formed on the principal surfaces of the piezoelectric elementary plate, each excitation electrode film comprises a region 13a having a uniform film thickness, and a region 13b with uniformly decreasing region positioned in the periphery of the region having uniform film thickness. |
