| 摘要 |
PROBLEM TO BE SOLVED: To provide a clamping device which is capable of uniformly clamping an object by making its parallelism conform to the main surface of the object. SOLUTION: The clamping device is equipped with an upper block 6 which is provided with a reference plane 5 serving as the reference of parallelism and fixed to a movable plate 2, a stage 7 which is provided corresponding to the upper block 6 and mounted with the object, a regulating block 9 having a shaft 8, and an regulating block 11 having a pivoting shaft 10. The pivoting shafts 8 and 10 which are supported in a rotatable manner by bearings are moved by a small angle while being shaken. The regulating block 9 pivots around the pivoting shaft 8, and the regulating block 11 pivots around the pivoting shaft 10, respectively. Therefore, even if the primary surface of the object placed on the stage 7 is tilted, the stage 7 is tilted in accordance with the inclination of the primary surface. By this setup, the object can be clamped as the parallelism of its primary surface is made conformable to that of the reference plane.
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