| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor measuring instrument which can always measure the contact resistances of probe cards in a normal state and can suppress the deterioration of its availability factor. SOLUTION: This semiconductor measuring instrument is used for performing electrical characteristic tests on a semiconductor wafer and is provided with a conductive measuring board 3 with which the needle point of the probe card 2 is brought into contact, a contact resistance measuring unit 5 which measures the value of a current which flows when a constant voltage is impressed upon the needle point of the card 2, and calculates the contact resistance value of the needle point from the values of the current and voltage. A turn table which is used for polishing the needle point of the card 2 when the resistance value measured by means of the measuring unit 5 is higher than a prescribed value. In addition, after it is confirmed by means of the measuring unit 5 that the contact resistance of the needle point of the card 2 is lower than the prescribed value, the electrical characteristic tests are performed on the semiconductor wafer.
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