发明名称 |
SEMICONDUCTOR INTEGRATED CIRCUIT AND FABRICATION PROCESS THEREFOR |
摘要 |
A semiconductor integrated circuit is provided which includes bump electrodes having a uniform height. The semiconductor integrated circuit includes: a semiconductor substrate (wafer) having a plurality of bump electrode formation areas and a bump electrode non-formation area respectively defined on a front surface thereof; a first electrode pad formed in the bump electrode non-formation area; a second electrode pad formed in each bump electrode formation area; and a bump electrode formed on each second electrode pad; wherein the first electrode pad is used for supplying a plating electric current to the second electrode pads through the semiconductor substrate in formation of the bump electrodes by electrolytic plating.
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申请公布号 |
US2002100975(A1) |
申请公布日期 |
2002.08.01 |
申请号 |
US20020058061 |
申请日期 |
2002.01.29 |
申请人 |
KANDA MAKOTO |
发明人 |
KANDA MAKOTO |
分类号 |
H01L21/288;H01L21/60;H01L23/485;(IPC1-7):H01L23/48 |
主分类号 |
H01L21/288 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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