发明名称 SEMICONDUCTOR INTEGRATED CIRCUIT AND FABRICATION PROCESS THEREFOR
摘要 A semiconductor integrated circuit is provided which includes bump electrodes having a uniform height. The semiconductor integrated circuit includes: a semiconductor substrate (wafer) having a plurality of bump electrode formation areas and a bump electrode non-formation area respectively defined on a front surface thereof; a first electrode pad formed in the bump electrode non-formation area; a second electrode pad formed in each bump electrode formation area; and a bump electrode formed on each second electrode pad; wherein the first electrode pad is used for supplying a plating electric current to the second electrode pads through the semiconductor substrate in formation of the bump electrodes by electrolytic plating.
申请公布号 US2002100975(A1) 申请公布日期 2002.08.01
申请号 US20020058061 申请日期 2002.01.29
申请人 KANDA MAKOTO 发明人 KANDA MAKOTO
分类号 H01L21/288;H01L21/60;H01L23/485;(IPC1-7):H01L23/48 主分类号 H01L21/288
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