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发明名称
EINRICHTUNG UND VERFAHREN ZUM REGELN EINER MAGNETRON-ZERSTAEUBUNGS-VORRICHTUNG, WELCHE EINZELNE BEGRENZTE MAGNETISCHE FELDER AN SEPARIERTEN, GETRENNTEN ENTLADUNGEN AUSGESETZTEN AUFTREFFPLATTEN AUFWEIST.
摘要
申请公布号
DE3580515(D1)
申请公布日期
1990.12.20
申请号
DE19853580515
申请日期
1985.05.10
申请人
VARIAN ASSOCIATES, INC., PALO ALTO, CALIF., US
发明人
MINTZ, DONALD M., SUNNYVALE CALIFORNIA, US
分类号
C23C14/36;C23C14/34;C23C14/35;C23C14/54;H01J37/34;H01L21/203;H01L21/285;H01L21/31;(IPC1-7):H01L21/203
主分类号
C23C14/36
代理机构
代理人
主权项
地址
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