| 发明名称 |
MAGNETIC FIELD FURNACE AND A METHOD OF USING THE SAME TO MANUFACTURE SEMICONDUCTOR SUBSTRATES |
| 摘要 |
An apparatus and method is provided for manufacturing a semiconductor substrate such as web crystals. The apparatus includes a chamber.and a growt h hardware assembly housed within the chamber.A magnetic field system produces a vertical magnetic field within the chamber. |
| 申请公布号 |
CA2432396(A1) |
申请公布日期 |
2002.08.01 |
| 申请号 |
CA20012432396 |
申请日期 |
2001.12.28 |
| 申请人 |
EBARA SOLAR, INC. |
发明人 |
MAISHIGI. KEIJI;GLAVISH, HILTON F.;ISOZAKI, HIDEYUKI;FUJITA, KENTARO |
| 分类号 |
C30B29/06;C30B15/00;C30B15/30;C30B29/02;C30B29/64;C30B30/04;(IPC1-7):C30B15/00 |
主分类号 |
C30B29/06 |
| 代理机构 |
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