发明名称 |
METHOD FOR MANUFACTURING SURFACE ACOUSTIC WAVE DEVICE AND INSPECTING INSTRUMENT |
摘要 |
An instrument for inspecting a surface acoustic wave device used as a high frequency filter in the field of mobile communication. The instrument comprises an electron gun (1) for generating and projecting an electron beam as primary electrons a condenser lens (2) for focusing the electron beam on a substrate (9) a secondary electron detector (4) for detecting secondary electrons emitted from the substrate (9) irradiated with the primary electrons a substrate holder (5) for holding the substrate (9), and a conductive grounding mechanism (6) earthed and capable of contacting with a metal film (7). The grounding mechanism (6) includes a conductive contact portion (12) capable of contacting with the metal film (7), an arm portion (47) with the contact portion (12) on its one end, and a rotary shaft (48) mounted on the end of the arm portion (47) and opposed to the contact portion (12). The substrate (9) has a two-layer structure including a circular piezoelectric substrate (8) made of lithium tantalate (LiTaO3) and the metal film (7) formed of aluminum (Al) on the piezoelectric substrate (8).
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申请公布号 |
WO02060054(A1) |
申请公布日期 |
2002.08.01 |
申请号 |
WO2001JP08639 |
申请日期 |
2001.10.01 |
申请人 |
KABUSHIKI KAISHA TOSHIBA;TAKAGI, TOSHIYUKI |
发明人 |
TAKAGI, TOSHIYUKI |
分类号 |
H03H3/08;(IPC1-7):H03H3/08;H01L21/027 |
主分类号 |
H03H3/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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