Micro-machined silicon on-off fiber optic switching system

摘要

An optical ON/OFF switch includes a micro-mechanical shutter formed on a silicon substrate using micro-mechanical fabrication techniques. The switch selectively opens and closes an optical path between two fibers with the micro-mechanical shutter. A micro-mechanical latch latches the shutter open or closed and remains in this state until electrical signals disengage the latch. Incoming and outgoing fibers are coupled to the shutter within the switch so that, when the shutter and the switch are ON (open) light couples between the ends of the two fibers. The fibers are positioned within stepped channels that hold each fiber along two edges within the channels so that the fibers are held in fixed alignment and relation. The fibers are laterally offset with respect to each other and the faces of the fibers are angled to limit back reflections from the shutter while still obtaining good coupling between the fibers.