| 摘要 |
PROBLEM TO BE SOLVED: To repeatedly generate electromagnetic waves with a wave length in an EUV region by irradiation of laser beams at a high frequency higher than several kHz. SOLUTION: This light source device comprises a vacuum vessel 1, a tape-like target 33 disposed in the vacuum vessel 1, a beam irradiation means for irradiation of an energy beam to the target 33, an input optical system 2 for guiding the energy beam to the target 33, an output optical system 5 for guiding generated electromagnetic waves, a shielding device 4 for protecting at least one of the input optical system 2 and the output optical system 5 from debris, and a wave length selecting device 53 for selecting electromagnetic waves with the wave length in the EUV region from the generated electromagnetic waves. The target 33 has a two-layer structure of a polymer film and a metal layer to suppress occurrence of the debris, and occurring debris is also shielded by the shielding device 4. A winding thickness of the target 33 can be decreased, so that long time supply is allowed and the device can be also miniaturized. |
