| 摘要 |
PROBLEM TO BE SOLVED: To change flow rate in multiple stages and to safely and accurately control, while being a compact structure. SOLUTION: An orifice plate 15 arranged in a flow control chamber 7 in a housing 5 and a plurality of orifices 16 are provided in the orifice plate 15. By causing the orifice plate 15 to more rotatingly, one of the orifices 15 is selectively located at a prescribed position P, facing a fluid inlet passage 6. A wear resistant member 20 is fixed to the orifice plate 15, and a plurality of engagement portions 21 are formed on the wear resistant member 20. A locking member 23 is arranged, facing at least one of the engagement portions 21, and the locking member 23 is energized to the side of the wear resistant member 20 by energizing means 24. By having engagement of the locking member 23 with the engagement portion 21 in a detachably one of the orifices 16 to be held at the predetermined position P.
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