| 摘要 |
PROBLEM TO BE SOLVED: To provide a release film for manufacturing a ceramic capacitor which makes it possible to provide, on one surface of a base, a release layer being excellent in uniformity of a film thickness and excellent in the adhesion to the base and further in the smoothness of the surface and poor in wettability, having uniform releasability, allowing no foreign matter such as dust to stick to the surface thereof and being excellent in the cleanability of the surface and very useful for manufacturing the ceramic capacitor, and a manufacturing method thereof. SOLUTION: The release film for manufacturing the ceramic capacitor is constituted of the base and the release layer provided at least on one surface of the base. The release layer is constituted of a continuous thin film layer of a silicon oxide. This film layer contains at least one or more kinds of compounds constituted of one, two or more kinds of carbon, hydrogen, silicon and oxygen, and the carbon atom content thereof is 5 atom % or more.
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