发明名称 |
WASHING METHOD AND DEVICE FOR CAPILLARY IN WIRE-BONDING DEVICE |
摘要 |
<p>PURPOSE: To provide a washing method of a capillary that can easily and fully wash the inner and outer surfaces of the wire insertion hole of the capillary for a wire-bonding device using the capillary. CONSTITUTION: In the washing method of the capillary 35 of the wire-bonding device, a tungsten wire 47 is inserted through the wire insertion hole 35a of the capillary 35 and ultrasonic vibration is applied to the capillary 35 while the tip section is dipped into washing liquid 49, thus easily and fully washing the inner and outer surfaces of the wire insertion hole 35a of the capillary 35.</p> |
申请公布号 |
KR20020062823(A) |
申请公布日期 |
2002.07.31 |
申请号 |
KR20020003798 |
申请日期 |
2002.01.23 |
申请人 |
NEC ELECTRONICS CORPORATION |
发明人 |
ARITA MITSUKI;KUWATA KOUJI |
分类号 |
H01L21/60;B08B1/04;B08B3/12 |
主分类号 |
H01L21/60 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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