| 摘要 |
PROBLEM TO BE SOLVED: To provide a plane positioning device capable of simplifying the replacement and adjustment of a laser beam source even when a trouble is generated, by separating the laser beam source itself as a separate body, in an optical interference length measuring machine. SOLUTION: In this plane positioning device mounted on a moving body capable of moving on a platen, and provided with an optical interference length measuring means capable of detecting a distance upto a solid body by a reflected beam of a laser beam, the length measuring means is provided with the laser beam source as the separate body for generating the laser beam, an optical fiber for following the moving of the moving body to extend the laser beam, and a laser beam receiving part attached with the optical fiber and for receiving the laser beam.
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