| 摘要 |
PROBLEM TO BE SOLVED: To provide a SiC or C fiber/SiC composite material which is suitable, e.g. for aerospace parts, nuclear reactor bulkheads and heat exchanger parts to be exposed to severe environments. SOLUTION: An SiC or C fiber molded body or fiber preform is closely adhered to the opening on the outlet side of a reaction gas feed tube. Gaseous alkylchlorosilane and gaseous hydrogen are fed to the fiber molded body so as to control the volume ratio of alkylchlorosilane to hydrogen to 0.1 to 0.5, and the alkylchlorosilane is thermally decomposed at the reaction temperature of 900 to 1,100 deg.C. The gaps of the SiC or C fiber molded body are filled with an SiC phase produced by the thermal decomposition reaction. As the alkylchlorosilane, methyl chlorosilane, dimethyl chlorosilane, ethyl chlorosilane, propyl chlorosilane or the like can be cited. |
