| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical switch with which the joining strength of the movable member and the mirror part can be secured, and low voltage drive is enabled, and which has excellent high speed response. SOLUTION: A switching part 60 has a mirror part 61, a 1st electrode layer 63, a 2nd electrode layer 64, and an insulation layer 65. The mirror part 61 is freely movably provided in the forward direction and backward direction with respect to the optical path in the 2nd channel waveguides 511-51N for the wavelength separation, and the 2nd channel waveguides 521-52N for wavelength composition. Moreover, the mirror part 61 includes a thin plate-shaped mirror member 61a which is erected at the 1st electrode layer 63, and a reinforcing member 61b formed continuously with the mirror member 61a. The reinforcing member 61b is positioned at both ends of the mirror member 61a, and is erected at the 1st electrode layer 63. The reinforcing member 61b has a columnar shape and has a diameter larger than the thickness of the mirror member 61a. At least, a part of the reinforcing member 61b projects to the optical incident side from the reflection plane of the mirror member 61a. |
