| 摘要 |
First, first conductivity type impurities are injected into a semiconductor substrate to selectively form a first conductivity type region. Next, second conductivity type impurities higher in concentration than that of the first conductivity type impurities are injected into a predetermined region in the first conductivity type region to selectively form a second conductivity type region. Then, first conductivity type impurities are selectively injected into the second conductivity type region to selectively form a lightly doped second conductivity type region. By the step, a concentration distribution is formed in which a concentration of first conductivity type impurities increases from the first conductivity type region toward the lightly doped second conductivity type region.
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