APPARATUS AND METHOD FOR SUPPLYING TREATED AIR

摘要

PROBLEM TO BE SOLVED: To reduce a running cost of a clean room by decreasing an air consumption amount of the room. SOLUTION: An atmospheric air is cleaned by an air supply unit 64. A method for supplying a treated air comprises the steps of heat exchanging the cleaned atmospheric air with an exhaust air from a lithographic unit 44 in the clean room by a first heat pipe 66, cooling the cleaned air, and dehumidifying the air. The method further comprises the steps of heat-exchanging the dehumidified air with the exhaust air of a vertical heat treating unit 46 by a second heat pipe 68, and heating the dehumidified air. The method also comprises the step of supplying the heated air to a housing of the unit 46.