ELECTROSTATIC SUSPENSION FURNACE

摘要

PROBLEM TO BE SOLVED: To provide an electrostatic suspension furnace in which a space can be saved by reducing the number of electrodes for controlling the position of a material, the number of works upon changing the material and size can be reduced and the position of the material can be detected with high accuracy. SOLUTION: For saving the space by reducing the number of electrodes for controlling the position of the material, the upper and lower electrodes 13 and 14 are respectively composed of three segment electrodes formed by dividing disk type plate electrodes into three. Either the upper electrode or the lower electrode may be composed of one disk type electrode.