METHOD OF MANUFACTURING PYROELECTRIC INFRARED DETECTOR ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide a method of manufacturing a pyroelectric infrared detector element capable detecting infrared rays using a pyroelectric which raises the dimensional accuracy of an orientated thin film pyroelectric for constituting an infrared photodetector, and realizes the improvement of the design quality/ yield to make a high power device. SOLUTION: The manufacturing method is to pattern a thin film pyroelectric 23 into a desired shape for constituting an infrared photodetector through a laminate etching mask made of an organic resist material and an inorganic resist material.