| 摘要 |
PROBLEM TO BE SOLVED: To provide an electroluminescence element with high resolution, restrained from unevenness of a light emission element caused by a mismatch between an evaporation mask and evaporation sections which is necessary for an organic EL display panel. SOLUTION: The manufacturing method of the EL element includes the processes of (a) arranging a mask having openings at prescribed positions so as to closely contact or come near the upper part of an insulation layer, after successively laminating the first electrode and the insulation layer on a substrate, and (b) removing the insulation layer from the first sections, of which the position is corresponding to the openings of the mask, by radiating electron beam from the upper part of the mask, and (c) forming a light emission layer with the first color on the first electrode exposed at the first sections from which, the insulation layer has been removed, by depositing the first organic electroluminescent medium while leaving the mask untouched, and (d) arranging the mask so that the openings of the mask locates at the position of making the second sections expose, while arranging the mask so as to closely contact with or come near to the upper part of an insulation layer. The light emission layers of respective colors are formed on the first electrode by repeating the process (b) and (c).
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