| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor vibration sensor which detects an acoustic vibration and a specified weak vibration simultaneously through the use of a single semiconductor vibration sensor. SOLUTION: The sensor is provided with an acoustic vibration detecting part 11 having a vibration film 3 consisting of Schottky joint and a p + buried layer 8 for efficiently propagating a carrier, a weak vibration detecting part 12 constituted of at least one or more cantilever beams and an element separation area 10 for electrically insulating the vibration detecting parts. The acoustic vibration is converted into an electric vibration by the change of a depletion layer width in the vibration film 3, the weak vibration is efficiently detected by the cantilever beams having a specified frequency, the weak vibration is converted into the electric vibration by a p-well 16 and, then, the respective vibrations are electrically taken out.
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