| 摘要 |
The present invention relates to a nozzle for thinning of phosphine (chemical formula PH<SUB>3</SUB>), which is consisting in a tube-like air-inducing, a ring-like mounted split (ring split) and/or in at least one lateral mounted little tube as PH<SUB>3</SUB>-inducing (inducer), whereby the thickness of the split opening and/or of the opening of the little tube is maximum 1/25 of the diameter of the tube like air-inducing (inducer) and/or of the distance between the surface of an air guiding element and the inner side of the tube-like air-inducing (inducer) in the area of the PH<SUB>3</SUB>-entrance. |
