| 摘要 |
PROBLEM TO BE SOLVED: To provide a scanning probe microscope having a probe not receiving lateral force when scanning a sample surface, capable of high-speed measurement, and allowing reduction of abrasion of the probe. SOLUTION: This microscope has a cantilever 14 with the probe 15, a Z micromotion part 13b changing an interval between a sample 17 and the probe 15, an XY scan control part 19 imparting relative displacement in the sample surface direction between the sample 17 and the probe 15, displacement detection means 21, 22 detecting displacement occurring in the cantilever 14, and a Z direction control part 20. When a physical quantity acting between the probe 15 and the sample 17 causes flexural deformation in the cantilever 14, the displacement of the cantilever 14 is detected by the displacement detection means 21, 22, and the displacement of the cantilever 14 is controlled to a set value. The microscope has a two-frequency signal generation part 27 imparting a signal which moves the probe 15 at two frequencies in the vertical direction, to the Z micromotion part 13b. |
