发明名称 Method for making integrated circuits
摘要 An improved method for making an integrated circuit. That method includes forming a first dielectric layer on a substrate, etching a trench into that layer, then filling the trench with a conductive material. The conductive material is then electropolished to form a recessed conductive layer within the first dielectric layer.
申请公布号 US2002096778(A1) 申请公布日期 2002.07.25
申请号 US20020060843 申请日期 2002.01.29
申请人 COX J. NEAL 发明人 COX J. NEAL
分类号 H01L21/3213;H01L21/768;H01L23/532;(IPC1-7):H01L21/44;H01L29/40;H01L23/48 主分类号 H01L21/3213
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