Hybrid sensor

摘要

A hybrid sensor (1) comprises an acceleration sensor (5) for detecting acceleration based on a temperature distribution of a gas hermetically enclosed within a fluid-tight space (7), and an angular velocity sensor (4) for detecting angular velocity based on a deviation of a flow (FY) of a gas, both sensors (4,5) being formed in one piece by the use of semiconductor processing technology. The acceleration and angular velocity sensors (4,5) are formed on a plurality of semiconductor substrates (2,3), which are superposed one upon another and united into a laminate. A sensitivity coefficient and an offset value for the two sensors are corrected based on the detection of angular velocities, accelerations and speeds of the object to which the sensor is attached, over a set time.