| 摘要 |
PROBLEM TO BE SOLVED: To provide a production method for a nozzle plate, an ink-jet recording head, and an ink-jet recording apparatus, capable of achieving a high formation accuracy and a high density of nozzle openings. SOLUTION: A nozzle plate 20 is produced by a first step of forming the same diameter parts 21a of a nozzle opening 21 having the size in the depth direction substantially same without piercing through the silicon single crystal substrate by dry-etching a silicon single crystal substrate from one side surface side in a nozzle plate to be bonded with a channel forming substrate provided with a piezoelectric element, and a second step of forming a tapered part 21b of the nozzle opening 21 with the opening area gradually enlarged toward the opening by wet-etching from the other side surface of the silicon single crystal substrate to the bottom part of the same diameter parts 21a.
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