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发明名称
摘要
申请公布号
JP2002522907(A)
申请公布日期
2002.07.23
申请号
JP20000564237
申请日期
1999.07.27
申请人
发明人
分类号
G09F9/30;H01L29/417;H01L29/786;(IPC1-7):H01L29/786
主分类号
G09F9/30
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