Multi-level spiral inductor structure having high inductance (L) and high quality factor (Q)

摘要

A high inductance and high-Q inductor structure formed using multilevel interconnect technology with deep trench has the same current flow direction in each spiral coil pattern. The inductor uses reflection and rotation transformation to generate each spiral coil pattern and neighboring spiral coil pattern relatively rotates with respect to the lower spiral coil pattern. Each spiral coil connection follows the connection code of edge end to edge end and central end to central end through via plugs. Each spiral coil is connected in series and total inductance results from summation of each spiral coil pattern.