| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor device with an evaluation unit capable of evaluation dielectric characteristics between a gate and a drain on an apparatus for evaluating RF characteristics for a semiconductor on a wafer and its evaluation method. SOLUTION: The device includes a semiconductor element 1 having a gate electrode 2, a source electrode 4 and a drain electrode 3; a gate electrode pad 6 connected to the gate electrode 2; a gate-grounding pad 7 that is provided in response to the gate electrode pad 6 and constitutes a pad for measuring a withstand voltage with the gate electrode pad 6; a source electrode pad 14 that is connected to the source electrode 4 and is electrically separated from the gate-side grounding pad 7; a drain electrode pad 11 connected to the drain electrode 3; and a drain-side grounding pad 12 provided in response to the drain electrode pad 11.
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