| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor measuring apparatus with a marking function of marking the results of a wafer probe test with high reliability and in a short time and a semiconductor device. SOLUTION: As a probing unit 10, there are provided a movement control stage 11 on which a semiconductor wafer WF is placed, and a circuit board 12 for transmitting a signal to a tester 14. In the circuit board 12, a probe card 124 is arranged in a region opposed to the semiconductor wafer WF. The probe card 124 is provided, aside from a probe 21, with a marking needle 22 the tip of which is guided to the specific region SA of a chip region CHIP. The making needle 22 puts a distinguishable mark on the specific region SA of the chip region CHIP according to the test results when the probe touches the semiconductor wafer WF and only when the circuit board 12 (probe card 124) is brought near to the wafer WF (chip region CHIP).
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