发明名称 MOUNT HEAD OF SEMICONDUCTOR EQUIPMENT
摘要 PURPOSE: A mount head is provided to previously prevent product inferiority by installing a horizontality affirmation apparatus. CONSTITUTION: A mount head comprises a horizontality affirmation apparatus(10) and a mount head body(5). The horizontality affirmation apparatus(10) further includes a groove(11) having a defined size formed in a defined portion of the mount head body(5), an arch-shaped curve parts(12) formed on the bottom of the groove(11) at regular intervals, a horizontality affirming part(13) having a spheric type located in the groove(11) for moving according to a horizontality state of the mount head body(5), and a cover made of a transparent material is mounted on the front surface of the groove(11) for easily affirming the position of the horizontality affirming part(13).
申请公布号 KR20020058532(A) 申请公布日期 2002.07.12
申请号 KR20000086641 申请日期 2000.12.30
申请人 HYNIX SEMICONDUCTOR INC. 发明人 KIM, JAE HWAN
分类号 H01L21/66;(IPC1-7):H01L21/66 主分类号 H01L21/66
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