| 摘要 |
PROBLEM TO BE SOLVED: To contribute to improvement in measurement precision of optical characteristics for the optical axial direction of a projection optical system. SOLUTION: Related to a control device 50, a target position in an optical axial direction of a slit plate 90 constituting a space image measuring device 59 is corrected, with the space image measuring device 59 controlled using position detecting systems (60a and 60b), while considering a position change component, which accompanies movement, in the optical axial direction of a stage RST, when the reticle stage RST is so moved that a measurement mark is positioned to an illumination region by an illumination light IL, for measuring the optical characteristics (for example, best focus position, image plane, and the like) in the optical axial direction of a projection optical system PL based on the space image of the measurement mark acquired by space image measurement. Thus, the optical characteristics in the optical axial direction of the projection optical system is measured precisely by space image measurement while controlling the position of the slit plate in the optical axial direction using a position detecting system even if there exists, for example, inclination or wave on a movement plane of the stage RST.
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