ELECTRON EMITTING DEVICE, COLD CATHODE FIELD ELECTRON EMITTING ELEMENT AND ITS MANUFACTURING METHOD, AND COLD CATHODE FIELD ELECTRON EMISSION DISPLAY DEVICE AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a cold cathode field electron emitting element structured so that a thin carbon film is formed certainly on the desired part of a cathode electrode. SOLUTION: The cold cathode field electron emitting element is composed of the cathode electrode 11 formed on a support 10 and a gate electrode 13 formed over the cathode electrode 11 and having an opening 14, and the arrangement further includes at least a thin carbon film selective growth region 20 formed on the surface of that part of cathode electrode 11 which is positioned at the bottom of the opening 14 and an electron emission part consisting of carbon thin film 23 formed in this selective growth region 20.