APPARATUS AND METHOD OF WAFER ALIGNMENT

摘要

PROBLEM TO BE SOLVED: To provide an apparatus and method of a wafer alignment capable of detecting crystal orientation of a semiconductor wafer without forming any orientation flat nor V-notch and accurately aligning even for elliptic wafer. SOLUTION: A wafer alignment apparatus picks up an image of a wafer W by detecting with a detecting means crystal orientation lines 25 for showing a crystal orientation of a wafer formed by grooves with dicing in a region of the wafer W without its circuit formed in addition to dicing lines 23 for zoning a chip, and recognize, the crystal orientation line 25 by processing the taken image.