发明名称 |
Scanning probe microscope |
摘要 |
In the first operation, the cantilever is oscillated at a frequency which is at opposite sides of a frequency band having a half value of an oscillation frequency f and amplitude A on a dependent curve (Q-curve). The cantilever oscillating frequency is far from an oscillation frequency (near a resonance point) where the cantilever is slow to damp, which enables the cantilever to quickly damp in accordance with a variation of a transient oscillation frequency after the probe comes into contact with the specimen, and allows the probe to follow the uneven surface state of the specimen.
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申请公布号 |
US2002088937(A1) |
申请公布日期 |
2002.07.11 |
申请号 |
US20010017123 |
申请日期 |
2001.12.14 |
申请人 |
ANDO KAZUNORI;WATANABE KAZUTOSHI;SHIKAKURA YOSHITERU;TSUCHIHASHI MASAKI;YAMAOKA TAKEHIRO |
发明人 |
ANDO KAZUNORI;WATANABE KAZUTOSHI;SHIKAKURA YOSHITERU;TSUCHIHASHI MASAKI;YAMAOKA TAKEHIRO |
分类号 |
G01B21/30;G01Q10/04;G01Q20/02;G01Q30/02;G01Q30/08;G01Q30/10;G01Q30/12;G01Q30/14;G01Q30/16;G01Q30/20;G01Q60/24;G01Q60/26;G01Q60/30;G01Q60/34;G01Q60/46;G01Q60/48;G01Q60/50;G01Q60/52;(IPC1-7):G12B21/20 |
主分类号 |
G01B21/30 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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