Semiconductor device for suppressing detachment of conductive layer and method for manufacturing the semiconductor device

摘要

A semiconductor device and a method for manufacturing the semiconductor device are provided in which a lower plug electrically connected with an active region of a wafer has a recession, and a conductive layer has a projection fitted into the recession of the lower plug, so that a contact area between the lower plug and the conductive layer increases without increasing a contact resistance therebetween. Thus, the conductive layer can endure physical impacts applied in the formation of the conductive layer itself and in subsequent integration processes, without detaching from the lower plug or the wafer.