发明名称 |
Optical method and apparatus for inspecting large area planar objects |
摘要 |
An optical inspection module and method are provided for detecting particles on a surface of a substrate. The module includes a substrate holding position, wherein the surface of the substrate defines an object plane at the substrate holding position. A light source illuminates substantially the entire substrate surface. A lens is oriented to collect light reflected from the light beam path by the substrate surface and has a lens plane. A photodetector array has a plurality of pixels defining an image plane within a focal plane of the lens. Each pixel corresponds to an area on the surface and the plurality of pixels together form a field of view that covers substantially the entire surface.
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申请公布号 |
US2002088952(A1) |
申请公布日期 |
2002.07.11 |
申请号 |
US20010994021 |
申请日期 |
2001.11.14 |
申请人 |
RAO NAGARAJA P.;KINNEY PATRICK D. |
发明人 |
RAO NAGARAJA P.;KINNEY PATRICK D. |
分类号 |
G01N21/95;(IPC1-7):G01N21/88 |
主分类号 |
G01N21/95 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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